Parylene
Maintainer: Jon Taylor
📂 Overview
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A 3D model of all tools and masks for parylene coating is available on EDMS:
EDMS Document – Parylene Tooling -
Production tooling has been printed and distributed according to the demands expressed by groups:
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All tools were printed on a Formlabs 3L resin printer at 50 µm layer height using Clear v4 / v4.1 resin (~£140 / litre).
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Tooling with 3D-printed vacuum surfaces were skimmed flat on a Bridgeport manual milling machine:
- Skimming depth: ~500 µm from base / ~100 µm from top surface
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Flatness verified on a granite inspection table with manual dial gauge: ~50 µm tolerance (typically 20 µm deviation)
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Tooling was cleaned with anti-static cleaning agent (RS:168-1659) before fittings were added and QC performed.
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Dicing tape has been ordered, and all the material for production has arrived at CERN. It is available on request (see the dedicated page).
🧰 Additional Tools and Materials
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Tweezers (ESD Safe):
- RS PRO 120 mm Stainless Steel (RS:136-9793)
- ideal-tek 125 mm Ceramic (RS:666-1058) -
Dicing tape: ICROSS, distributed from Japan via CERN (SB-170HM) - all the material for production has arrived at CERN. It is available on request (see the dedicated page).
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Silicone: Stannol Solder Mask, 100–250 ml
- 👉 Common CERN orders can be placed for sites that cannot easily purchase it (see the dedicated page). -
Swabs / Cue tips (ESD Safe):
- ideal-tek swabs, plastic handle, electronics/optics use, pack of 25 (RS:865-1319) -
Lint-free cloths:
- LynbondUltima II® Cleanroom Wiper – ISO Class 3+ -
Dispensing equipment:
- 5 ml syringes: RS PRO (RS:514-717)
- Syringe tips: Metcal Yellow Straight Dispensing Tip, 20 G (RS:665-4798) -
Vacuum handling:
- SIPEL Portable ESD Safe Vac Pen -
Cleaning spray:
- Anti-static foam cleanser (RS:168-1659)